TX-20A

TX-20A

機 台 型 號: TX-20A

機台出廠前均會進行完整測試SOP，以確認正常使用下均能正常運作。

訂購請洽詢客服

  • TX Series is designed to meet 200mm and 300mm OEM tool specifications
  • Wide temperature range(-20℃ ~ +80℃)  
  • Circulating fluid DI/EG, Galden®,  or FluorinertTM compatible.
  • Magnetically coupled pump(Leak free)
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces (RS-232C/RS-485, Digital, Analog, and others)
  • SEMI S2 and F-47 comliant
  • Central monitoring system (CMS)(optional)
 

 

TX-20A Specification

Item

Chiiler Model

spec

1

Fluid

DI / GL

2

Temp. Range (deg.C)

-20~+80degC

3

Max Cooling Capacity KW @ ℃

3Kw(@ 15℃ 60Hz)

4

Max Heating Capacity KW @ ℃

2Kw

5

Pump capacity GPM @ Psi(60Hz)

20liter/min at 0.5Mpa(60Hz)

6

 Power (Voltage/Current)

3-phase  208V，20A

7

Power Consumption (KW )

2.5KW/h

8

 Safety Design

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

9

防漏設計

Magnet Pump

10

節能設計
1. Heat Exchanger
2. Pump
3. Heater

1.多餘冷量與PCW進行熱交換
2.變頻
3.PID調整功率           

11

Pump Type / Power Consumption

SPECK-4281
1.5Kw(60Hz)

12

Chiller Control Method

PID

13

DI Tank

N

14

是否需定期更換Filter

Y

15

Size(W*D*H)

484*760*1200mm

16

CXF prevention

Y

17

Fluid purge function

N

18

符合規範之 SEMI-S2

Y