TX-2020
- TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
- Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
- High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, Fluorinert®, HFE™
- User-friendly touch panel display with multiple functions
- Small foot print
- Multiple interfaces(LAM, AMAT-CHX)