所有設備
TX-2020 is designed to meet 200mm and 300mm OEM tool specifications Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller) High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, ...
Super Chiller with huge cooling capacity User-friendly touch panel display Compact footprint Environmentally friendly SEMI S2 and F-47 compliant Central monitoring system (CMS) (Optional) &n...
Water/Water heat exchanger. huge cooling capacity User-friendly touch panel display Small foot print Environmentally friendly SEMI S2 and F-47 complaint Central monitoring system(CMS)(Optional) TX-H30KW...
TX-30S is designed to meet 200mm and 300mm OEM tool specifications Single Channel heat exchanger High temperature dual coolan compatible DI/EG or Galden®/Fluorinert® User-friendly touch panel displa...
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